Qnity’s HSE product can deliver customized etch solutions with superior selectivity, excellent uniformity, and reduced defectivity across diverse materials and complex device structures.
HSE1000 series
HSE1000 series delivers high-precision vertical and lateral silicon etching performance with excellent selectivity and compatibility to SiOx, SiGe, and SiN materials.
HSE3000 series
HSE3000 series provides highly selective SiOx and AlOx etching with outstanding metal compatibility and improved etch performance in advanced semiconductor processes.
HSE4000 series
HSE4000 series is a specialized TiN etchant solution engineered for seamless TiN removal while maintaining excellent compatibility with high-k materials.
HSE5000 series
HSE5000 series offers highly uniform molybdenum (Mo) etching performance across complex structures, delivering excellent top-to-bottom uniformity.
HSE6000 series
HSE6000 series is formulated to effectively remove tin (Sn) particles and process-related residues while minimizing impact on surrounding materials, surface cleanliness, and process stability.
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