Epic™ ArF dry photoresist
EpicTM 2391 is a positive tone dry 193nm resist designed for memory contact hole. This technology has been optimized for memory back-end layer contact hole applications.
Features & Benefits
- Large depth of focus
- Excellent contact hole profile and under dose margin
- Excellent PEB sensitivity
- Stable shelf-life
- Low defect density
Product Details
Feature size:100nm hole
SB/PEB=100/120, 60sec, Thickness=1,600A
For further product information please contact your Qnity
Technical Sales Representative.
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