Emblem™ 5060 Series CMP Pads

Emblem™ 5060 Series CMP Pads

Emblem™ 5060H and 5061H are advanced polishing pads for chemical mechanical planarization (CMP) from the Emblem™ CMP platform, designed to deliver high removal rates and low defectivity across multiple semiconductor applications. Built on Qnity’s novel modulated supramolecular technology, these pads provide a tunable, sustainable solution that minimizes traditional CMP tradeoffs while enabling faster optimization for diverse customer requirements.

Emblem™ 5060H/5061H pads support next‑generation manufacturing with improved efficiency, lower cost of ownership, and reduced environmental impact. 

Applications
  • Tungsten (W) bulk CMP
  • Copper (Cu) CMP
  • Shallow trench isolation (STI) / interlayer dielectric (ILD)
  • Poly CMP
  • Advanced semiconductor manufacturing requiring high throughput and low defectivity 
Benefits
  • Up to 40% higher removal rates with 20% lower defectivity
  • Step out performance without planarization or defectivity tradeoffs
  • Highly customizable formulations for faster, application-specific optimization
  • Proprietary modulated supramolecular technology enables longer pad life and reduced slurry consumption
  • Low chlorine formulations support compliance and sustainability goals
  • Durable performance reduces consumables and lowers total cost of ownership
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
View by:
To access secured content from DuPont Please Sign In or Sign Up below
     
     
     
     
     
     

    Other CMP Applications

    Our CMP pads cover a wide range of applications and technology nodes. To further explore Qnity CMP pads, see our overview of the product families by application